首页>
外国专利>
Microfluidic-channel embeddable, laterally oscillating gravimetric sensor device fabricated with micro-electro-mechanical systems (mems) technology
Microfluidic-channel embeddable, laterally oscillating gravimetric sensor device fabricated with micro-electro-mechanical systems (mems) technology
展开▼
机译:利用微机电系统(mems)技术制造的微流体通道可嵌入,横向振荡重量传感器设备
展开▼
页面导航
摘要
著录项
相似文献
摘要
Laterally oscillating gravimetric sensing device embeddable under micro-fluidic channels and fabricated with micro-electro mechanical systems (MEMS) technology, which detects biological cells and analytes by measuring the change of mass attached on its surface is composed of four main groups, namely a resonator that can be placed onto the basis of the channel, components of the resonator bio-activation, a micro fluidic channel, and the microfabrication techniques, and its main components are the proof mass (1), comb fingers fixed to proof mass (2), folded spring beams (3), channel floor and mechanical soil (4), stationary electrodes (5), comb fingers attached to the stationary electrodes (6), golden film deposited onto the mass (7), immobilized biologic recognition molecules (8), and micro fluidic channel placed on resonator structure (9).
展开▼