Transmission electron microscopy investigation of texture development inmagnesium oxide buffer layers

摘要

Biaxially textured magnesium oxide (MgO) buffer layers were grown by inclinedsubstrate deposition and examined before YBa(sub 2)Cu(sub 3)O(sub 7-x) deposition to optimize their texture. Transmission electron microscopy of buffer layers in both cross-sectional and texture development as a function of deposition thickness (0.05-3 um) and substrate inclination angle (0-55 degrees from the substrate normal). It was determined that the combined effects of preferential growth of the (200) equilibrium crystal habit of MgO and shadowing by columnar grains led to the development of off-axis (200)-textured films.