Influence of Specimen Thickness in Quantitative Electron-Energy-Loss Spectroscopy: II

摘要

Homogenous specimens of boron nitride (BN), nickel oxide (NiO), and aluminium oxide (Al sub 2 O sub 3 ) were analyzed as a function of thickness (0.25 < t/lambda < 2.5) for scattering angles of 2.6, 5.7, and 14.7 mr at an incident beam energy of 100 keV using a Philips EM400 TEM. EELS measurements were made with both a Gatan 607 EELS and a pi /2 magnetic sector analyzer designed by the author. EELS spectra were recorded at energy resolutions approx. 3 eV over the range 0 to 3 keV, on a EDAX PV9100 MCA. Deconvolution of multiple scattering was accomplished using the method described by Leapman and Swyt. (ERA citation 08:041712)