Ion-beam-assisted deposition of wear-resistant coatings. Quarterly summary.

摘要

Chromium oxide coatings were deposited using the IBAD technique onto single crystal silicon substrates, with their friction and wear behavior being evaluated in sliding against either a 52100 steel ball or a silicon nitride ball. Microhardness tests resulted in values of approximately 1900 KHN for the coatings, 1300 KHN for bare silicon, and 750 for bare 52100. In sliding against the 52100 ball, no loss of material or deformation of the coating was observed. For sliding against the silicon nitride ball, in the absence of the coating a deep wear scar was observed on the silicon whereas with the coating, virtually no wear was detected, indicating almost complete protection. A new microwave ion source was interfaced with a UHV vacuum chamber, providing a new IBAD system. Several TiN coatings were produced and their mechanical properties are currently being evaluated.