Nonequilibrium Plasmas: Development and Application of Bulk and Near SurfaceLaser Diagnostics for Plasma Processing

摘要

The two-photon laser induced fluorescence (TALIF) diagnostic has been developedand/or applied to plasma processing systems involving H, 0, and N atoms. Based upon TALIF data, models have been developed for the spatial and temporal variation of the absolute atomic concentrations in H2, 02, and N2 plasmas. The portability of the TALIF diagnostic has been demonstrated. Limitations of the technique due to stimulated emission and fluorescence quenching have been investigated and procedures developed to minimize their effects.