Chemical Analyzer for In Situ and Real Time Surface Monitoring for Composition Control During Synthesis of Compound Semiconductor Films.

摘要

The Phase 1 project to test the feasibility of Auger monitoring during MBE growth both in situ and real-time has resulted in a wealth of spectra to analyze. The equipment performs dependably without impacting the MBE process. The Auger spectra reproducibly track expected growth events while adding insight to dynamic surface conditions previously not observable. The data processing developed provides sufficient information for evaluations needed for Phase 1 feasibility studies. As a result of the Phase 1 work, it has been shown that the Auger Probe is viable as an in situ real-time chemical monitoring tool for MBE. Such information can already be used to guide the growth process of materials for which the actual surface conditions are critical. Additionally, no limitations were noted that would prevent the use of the Probe for materials beyond those tested or in other growth methods, like PLD. The Auger Probe, after improvements and software updates for real time, continuous, multiple line acquisition, would prove to be a well suited tool for the characterization of in situ growth