All-Solid-State Drivers for High Power Excimer Lasers Used in Projection Gas Immersion Laser Doping

摘要

The objective of this SBIR program is to develop all-solid-state pulsed modulators to drive the high power excimer lasers required to commercialize the Projection Gas Immersion Laser Doping (P-GILD) process. P-GILD uses a pulsed, 200-watt-class excimer laser as an illumination source to produce ultra-shallow, low-sheet resistance, box-like and retrograde impurity profiles in silicon without the use of high temperature anneals or conventional ion implantation. P-GILD thus meets all of the criteria for fabricating optimized deep-submicron devices. The P-GILD process requires a factor-of-20 scale up in average power from the production-worthy excimer laser technology now developed for 0.25 micron DUV lithography. All-solid-state drivers were essential to meeting component lifetime and cost of ownership requirements in the 10 watt KrF lasers used in DUV lithography and solid state drivers will be even more important in developing the high power excimer laser required for P-GILD. In this SBIR, SRL worked closely with Cymer, the leading supplier of excimer lasers for DUV lithography worldwide, and Ultratech Stepper, the developer of the P- GILD process, to generate a detailed engineering design of an all-solid-state driver for a high power excimer laser designed to meet P-GILD process requirements. In addition, an all-solid-state driver was fabricated to test critical aspects of the design on a 150 watt excimer laser head supplied by Cymer.