Fabrication and Properties of Nanolaminates Using Self-Limiting Surface Chemistry Techniques

摘要

Nanolaminates are multilayered thin film structures with very high interfacial density. These composite multilayer structures can display interesting properties that are not observed in the individual components. These special properties can be optimized by manipulating the thickness and composition of the individual nanolayers. The optimized nanolaminates may have important applications as better protective coatings and thin films with enhanced optical and electrical properties. Our research has focused on the fabrication of nanolaminates with atomic layer deposition (ALD) techniques based on sequential self-limiting surface chemistry. We have also concentrated on measuring the properties of nanolaminates. Our goal has been to grow and characterize metal/ceramic and ceramic/ceramic nanolaminates and to develop design rules for the construction 0 novel nanocomposite materials. We have utilized the ALD techniques that we have recently pioneered to obtain atomic layer controlled growth. We have utilized our surface chemistry for W ALD and A1203 ALD to construct W/A1203 metal/ceramic nanolaminates. We have also used our surface chemistry for ZnO and A1203 ALD to construct ZnO/A1203 ceramic/ ceramic nanolaminates and alloys. Following the growth of these nanolaminates, we have determined structure/property relationships for nanolaminates.