Introduction to Micromechatronics

摘要

An actuator is a transducer that transforms drive energy into a mechanical displacement or force. The demand for new actuators has increased significantly in recent years especially for positioner, mechanical damper, and miniature motor applications. These devices are used in a variety of fields such as optics, astronomy, fluid control, and precision machining. Sub- micrometer fabrication, common in the production of electronic chip elements, is also becoming important in mechanical engineering. Machining accuracy has improved over the years. One of the primary reasons for the improved accuracy is the development of more precise position sensors. Sensors utilizing lasers can easily detect nanometer scale displacements.