Improved Performance of MEMS Based Filters

摘要

As the demand for wireless communications technology continues to increase, so too does the demand for effective and efficient filters, as these devices, which pass signals with frequency components inside a specific bandwidth while attenuating those outside of it, are often integral components of such technology. Micro-scale components are more desirable than their more conventional counterparts primarily due to their size, low power consumption, and ease of integration with electrical systems. Our approach to developing switches and filters is unique among MEMS research, since we use parametric resonance, as opposed to the usual linear resonance, for frequency selection. The response outside of the parametric resonance zone is essentially zero, leading to very sharp roll-off characteristics and ideal stop-band rejection. However, the parametric resonance has some undesirable features from the standpoint of filter performance, most notably: the bandwidth depends on the amplitude of the input; there is a nonlinear input/output relationship, which includes hysteresis; and multiple parametric resonances, some undesirable, may exist in a given system.