Structural Effects in the Dielectric Constant Rare-Earth Oxides: Nd2O3

摘要

Thin films of Nd2O3 have been studied. For the amorphous phase the dielectric constant is k approximately 11 whilst the refractive index is 1.76 0.02, in the cubic form these values are approximately 13.6 15.4 and 1.93 0.02. Hexagonal films have dielectric constants in the range 17 21 and estimates based upon the cubic values lead to k approximately 27, we were unable to determine a reliable refractive index value. The normally high temperature hexagonal phase could be nucleated on a Si substrate by deposition at relatively low temperature approximately 280 C.