Fabrication and Characterization of Nanoporous Energetic Silicon

摘要

Arising as a new class of energetic material, nanoporous energetic silicon holds great potential for applications such as fuzing and thrust generation, which require large power output. In this paper we address fabrication and material characterization as well as monolithic integration of a hotwire initiator and packaging; the first steps toward a fully integrated MEMS/IC/energetic material system.