Parametric Approach to Determining the Optimum Geometry for PZT MEMS Switches Intended for Digital Applications

摘要

We designed lead zirconate titanate (PZT) microelectromechanical systems (MEMS) switches for low frequency digital logic applications. The devices were fabricated with a variety of design variables of interest, including actuator length/width, contact length, actuator/contact geometries, and contact metallurgy (Au/Pt, Au/Ru, and Au/Au). To assess the impact of each variable on device performance, we measured device wafers using a SUSS semi- automated probe station and associated control hardware and software, which evaluated contact resistance, actuation voltage, minimum actuation voltage using a constant bias voltage, and propagation delay. The measurements were then analyzed to determine the optimal switch geometry and contact material combination for digital applications. Future work is planned to examine repeatability of these statistics over multiple cycles and across multiple wafers.