Functionalized MEMS Sensors for Capacity-Based Residual Life Indicators.

摘要

Technologies that provide real-time assessment of filter impregnate residual lifetime will increase the efficiency of filter usage and ensure safe operating conditions. Detection technologies that are small and can be located within or near filter elements are desirable. Low-cost devices are also necessary, since filter usage is widespread. Recognition chemistries are also required to provide both sensitivity and selectivity, since gases passing through filters may contain a wide range of components. To meet this need Sandia National Laboratories and Georgia Institute of Technology are teaming to develop microfabricated sensors for residual life indication. We are studying highly sensitive microsensor platforms for residual life indication. Piezoresistive static microcantilevers respond to changes in surface stress by changing resistance as the cantilever deflects from analyte interaction with the surface coating. Sensitivity to subnanogram quantities are predicted. Our research focuses on the response of active sensor coatings to battlefield contaminants, and potentially interfering compounds that are otherwise of no concern.