Permalloy films evaporated at normal and oblique incidence to a substrate were examined by replication of their surfaces. Electron micrographs revealed chains of particles perpendicular to the incident beam when the angle of incidence was <70° and parallel to the incident beam when the angle was > 70°. The degree of alignment depended upon the angle of incidence and thickness of the film. A statistical analysis of the micrographs was made.
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