Laser Window Surface Finishing and Coating Technology.

摘要

The authors report on the objectives and the progress achieved in a program to study the surface finishing and coating of laser windows. The program covers six technology areas:surface finishing,surface characterization,coating techniques,optical evaluation,chemical analysis,and laser window damage studies. Mechanical-chemical surface finishing results for KCl and ZnSe are discussed. Potassium chloride surfaces have been produced which result in KCl windows having improved damage resistance of >130 J/sq cm. Laser damage to antireflection coated ZnSe windows,at 10.6micrometers,appears to be limited to the bulk properties of ZnSe rather than to the surfaces or coatings. Germanium films produced by ion beam sputtering and by evaporation in ultrahigh vacuum onto KCl substrates have been evaluated and compared. The 10.6micrometers calorimetric data and the chemical analysis of the Ge films obtained using Rutherford backscattering and Auger analysis are reported. The analysis results show evidence for the presence of K and Cl incorporation in the Ge films prepared. (Author)