Research in the Production of Rare-Earth-Cobalt Permanent Magnet Material by Sputter Deposition.

摘要

Contents:Sputter deposition of rare-earth-cobalt alloys;Metallurgy of sputtered magnet material;Magnetic property studies -sputtered amorphous alloys, RCo5alloys, R2(Co,Fe)17alloys;Oxygen control studies;Preparation of EuCO5;Texture control studies;Substrate-deposit compatibility studies;Substrate removal studies;Sputtering system design considerations;Manufacturing process feasibility evaluation.