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Study of the Surface Properties of Thermally Oxidized Silicon using Surface Acoustic Wave Attenuation

机译：用声表面波衰减研究热氧化硅的表面性质

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作者
Webster, R. T.; Estrada-Vazquez, H.; Das, P.;
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年度 1978
页码 p.1-10
总页数 10
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Surface waves; Radiation attenuation; Silicon dioxide; Electroacoustics; Surface properties; Acoustic delay lines; Reprints;

机译：表面波;辐射衰减;二氧化硅;电声学;表面特性;声延迟线;重印;

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Study of the Surface Properties of Thermally Oxidized Silicon using Surface Acoustic Wave Attenuation

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