Two-Dimensional Numerical Simulation of Semiconductor Devices

摘要

Two-dimensional numerical simulation is a necessary tool for modern semiconductor device design. Analytical models and judicious application of one-dimensional simulation cannot accurately represent the highly two-dimensional impurity profiles and structures of VLSI devices. Moreover, the allowable device structures and bias conditions of existing two-dimensional simulation programs are too restrictive to provide the necessary design information. A two-dimensional numerical simulation program, PISCES, has been written in order to study various aspects of device simulation. The program uses vectorized LU decomposition to alternately solve Poison's equation and the electron current continuity equation (Gummels method). The program is extremely flexible and useful in evaluating two-dimensional simulation concerns such as grid allocation, boundary conditions, convergence characteristics and physical models. (Author)