Quality Procedures for VLSI/VHSIC (Very Large Scale Integrated and Very High Speed Integrated Circuits) Type Devices.

摘要

Procedures for microcircuit screening and qualification to ensure the reliability and uniformity of VLSI/VHSIC devices were prepared on this effort. The use of Process Control Monitors (PCM) and Reliability Evaluation Modules (REM) were incorporated in the procedures. In addition, recommended guidelines for the evaluation of Computed-Aided-Manufacturing (CAM) facilities were generated in this study. A proposed replacement was provided for existing Method 5007 to MIL-STD-883, Wafer Acceptance Procedure which incorporates reliability screening, process quality evaluation, and electrical parameter testing of each wafer in a lot. Keywords: Very Large Scale Integrated and Very High Speed Integrated Circuits, Line Certification, and Qualification Procedures.