Optical Detection of Photoacoustic Pulses in Thin Silicon Wafers.

摘要

The propagation of photoacoustic pulses in thin silicon wafers is studied by a probe-beam deflection method. A comparison with transducer measurements is made, which suggests the existence of a nonpropagating plate mode. A signal-to-noise analysis is carried out, and the sensitivity of this detection scheme is analyzed for the case of high-frequency broad-hand detection.