Glancing Angle Deposition System for Advanced Fabrication of Metamaterial and Transformation-Optics Devices.

摘要

Transformation optics is opening the door to new devices and applications by manipulating the flow of light on the nano-scale combining smart design, material engineering and fabrication. This level of controlling light requires unique and complex structures that are not possible to realize with traditional planar patterning and deposition techniques. While traditional physical vapor deposition systems only allow for 2-Dimensional top-down fabrication, Glancing Angle Deposition (GLAD) allows for quasi 3-Dimensional fabrication of structures.