首页> 外国专利> MENUFACTURING METHOD FOR THIN FILM USING GLANCING ANGLE DEPOSITION OF A DEPOSITION MATERIAL AND HIGH REFLECTION COATINGS METHOD USING IT

MENUFACTURING METHOD FOR THIN FILM USING GLANCING ANGLE DEPOSITION OF A DEPOSITION MATERIAL AND HIGH REFLECTION COATINGS METHOD USING IT

机译:利用沉积材料的倾斜角沉积制造薄膜的方法以及使用该方法的高反射涂层方法

摘要

A multi-layered thin film manufacturing method and a high reflective coating method using the same are provided to prevent a chamber from being polluted and reduce defective production by removing impurity and fine dust remaining in a thin film. A multi-layered thin film manufacturing method comprises: a step for depositing one kind of material on a substrate; a step for changing a glancing angle by glancing angle deposition; and a step for changing refractive index and manufacturing a thin film deposited over three layers. The multi-layered thin film is coated to have the average reflection rate of 95% or more in an ultraviolet ray region, a visible ray region and wavelength band of the ultraviolet ray region.
机译:提供一种多层薄膜制造方法和使用该多层薄膜制造方法的高反射涂层方法,以通过去除残留在薄膜中的杂质和细粉尘来防止腔室被污染并减少不良生产。一种多层薄膜制造方法,包括:在基板上沉积一种材料的步骤;通过掠角沉积来改变掠角的步骤;改变折射率并制造沉积在三层上的薄膜的步骤。多层薄膜被涂覆为在紫外线区域,可见光区域和紫外线区域的波长带中具有95%以上的平均反射率。

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