MENUFACTURING METHOD FOR THIN FILM USING GLANCING ANGLE DEPOSITION OF A DEPOSITION MATERIAL AND HIGH REFLECTION COATINGS METHOD USING IT

摘要

A multi-layered thin film manufacturing method and a high reflective coating method using the same are provided to prevent a chamber from being polluted and reduce defective production by removing impurity and fine dust remaining in a thin film. A multi-layered thin film manufacturing method comprises: a step for depositing one kind of material on a substrate; a step for changing a glancing angle by glancing angle deposition; and a step for changing refractive index and manufacturing a thin film deposited over three layers. The multi-layered thin film is coated to have the average reflection rate of 95% or more in an ultraviolet ray region, a visible ray region and wavelength band of the ultraviolet ray region.