Ion Assisted Deposition of Fiber Coatings for Ceramic Matrix Composites wth Low Dielectric Loss Tangents

摘要

The preliminary goal of achieving facility in the growth and characterization of thin amorphous silver nitride films was reached without difficulty. Thermal annealing studies resulted in the discovery of both bubble formation and crystallization in the film. This research can be divided into three segments. First is the fabrication of the amorphous films themselves. Second, the thermal stability of the films on various substrates would be investigated. Thirdly, the knowledge obtained about the structure and properties of the material would be utilized in understanding and further refining the science of thin film deposition. These divisions were reflected finally in the preparation of three publications: Near Infrared Rugate Filter Fabrication by Ion Beam Assisted Deposition of Si(1-x) N(x) Films - The major emphasis of this paper is on the optical properties of the films. Stability of Silicon Nitride Coatings Produced by Ion Assisted Deposition; Fractal and spherulitic Morphology of Silicon Nitride Crystallized from Amorphous Films. (MJM/AW)