Full Surface Interferometric Testing of Grazing Incidence Mirrors

摘要

This contract demonstrated the proof-of-principle of the Full SurfaceInterferometric Scanner (FSIS), an instrument which can rapidly and reliably measure both the full surface figure as well as the macroroughness of grazing incidence optics. The FSIS has the potential to fill the need of SDIO to characterize and qualify the necessary off-axis aspherical mirror technology that will be used for weapon pointing, beam control, and beam propagation through several environments and countermeasures. This instrument design is based on the use of normal incidence, sub-aperture interferometry and wavefront shearing interferometry which surmounts many of the problems encountered by other (eg, long trace profilers) techniques. This new system, the FSIS, for which we have developed a breadboard system which makes novel use of three sequential operations: sub-aperture slope measurement, wavefront integration, and surface profile synthesis. It appears that the FSIS will find application in X-ray and UV high resolution lithography, medical imaging, astronomy, physics, microbiology, and industrial (surface) quality control. (jhd)