Two-Dimensional Particle Simulation of Parallel Plate Radio-Frequency (RF) GlowDischarges

摘要

A two-dimensional model of parallel plate RF glow discharges was developed tostudy discharge phenomena important in plasma assisted processing of materials. The particle-in-cell method is used to calculate the trajectories of computer particles under the influence of both self and applied fields. Monte Carlo methods using the null collision technique are used to model collisions between charged particles and neutral gas atoms. Results of computer experiments are presented with special emphasis placed on ion motion in the sheath regions. Experimental results show some qualitative agreement with one-dimensional model results. Further work required to gain quantitative agreement is outlined.... Plasma processing, Radio-frequency, Glow discharge, Simulation.