Structure and Morphology of Pd Overlayers on Epitaxial SnO2 Films Studies withthe Atomic Force Microscope

摘要

The structure and morphology of clean and Pd-doped epitaxial SnO2 films werestudied with the atomic force microscope (AFM). The SnO2 films were grown by reactive sputter deposition on three different substrates yielding epitaxial orientations: (101) SnO2/r-cut sapphire, (100) SnO2/basal sapphire, and (110) SnO2/TiO2 (110). AFM imaging of monolayer amounts of Pd deposited onto the epitaxial SnO2 films shows that the Pd is dispersed at 300 K and forms clusters after annealing to 500 K in vacuum. Atomic force microscopy, Gas sensors, Pd-doped SnO2 Films.