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首页> 外文期刊>Physica, C. Superconductivity and its applications >Thickness and composition dependence of microwave properties of YBCO thin films on CeO2-buffered sapphire substrates
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Thickness and composition dependence of microwave properties of YBCO thin films on CeO2-buffered sapphire substrates

机译:CeO2缓冲蓝宝石衬底上YBCO薄膜的微波性质的厚度和成分依赖性

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摘要

We investigated the influence of the crystallinity and the composition of YBCO film on the formation of cracks in layers deposited on sapphire R substrates with CeO2 buffer layers. The CeO2 films and YBCO films were deposited using RF magnetron sputtering, Y-rich YBCO films, 0.5-1 mum thick, deposited onto a 300 Angstrom thick CeO2 film showed good crystallinity and low microwave surface resistance. In high magnification SEM observation, cracks were not observed for films up to 1 mum in thickness. (C) 2002 Elsevier Science B.V. All rights reserved. [References: 11]
机译:我们研究了结晶度和YBCO膜组成对沉积在具有CeO2缓冲层的蓝宝石R衬底上的层中裂纹形成的影响。使用射频磁控溅射沉积CeO2薄膜和YBCO薄膜,沉积在300埃厚的CeO2薄膜上的0.5-1μm厚的富Y YBCO薄膜显示出良好的结晶度和低微波表面电阻。在高倍SEM观察中,厚度不超过1μm的膜未观察到裂纹。 (C)2002 Elsevier Science B.V.保留所有权利。 [参考:11]

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