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Thickness and composition dependence of microwave properties of YBCO thin films on CeO_2-buffered sapphire substrates

机译:CEO_2缓冲蓝宝石基板上YBCO薄膜微波性能微波性能的厚度和组成依赖性

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We investigated the influence of the crystallinity and the composition of YBCO film on the formation of cracks in layers deposited on sapphire substrates with CeO_2 buffer layers. The CeO_2 films and YBCO films were deposited using RF magnetron sputtering. Y-rich YBCO films, 0.5-1 μm thick, deposited onto a 300 A thick CeO_2 film showed good crystallinity and low microwave surface resistance. In high magnification SEM observation, cracks were not observed for films up to 1 μm in thickness.
机译:我们研究了结晶度和YBCO膜的组成对具有CeO_2缓冲层沉积在蓝宝石型底物的层中的裂缝的影响。使用RF磁控溅射沉积CEO_2薄膜和YBCO薄膜。 Y丰的YBCO薄膜,0.5-1μm厚,沉积在300厚的CEO_2膜上显示出良好的结晶度和低微波表面电阻。在高倍率SEM观察中,未观察到厚度为1μm的薄膜的裂缝。

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