Microstructure and magnetic properties of [FePt/AlN](n) multilayers deposited by RF magnetron sputtering

摘要

FePt(50 nm) and [FePt(2,3,5 nm)/AIN(1 nm)](n) films were prepared by RF magnetron sputtering technique, then annealed at 550degreesC for 30min. This work investigates the effect of the number of bilayer repetitions (n) and AIN concentration on structures and magnetic properties of various [FePt/AIN](n) multilayers. The highest coercivities of [FePt/AIN](n) multilayers were obtained when n was given as 8. The grain sizes of [FePt/AIN](n) films were increased with increasing n. Introducing the non-magnetic AIN not only hindered the growth of FePt particles, but also reduced the intergrain exchange interactions of the [FePt/AIN](n) films. And the intergrain interactions were decreased with increasing AIN concentration. (C) 2004 Elsevier B.V. All rights reserved.