METHOD OF INCREASING THE ELECTRIC STRENGTH OF A DIELECTRIC FILM

摘要

A breakdown of dielectric films is most often observed in metala ielectric Aetal systems. If the dielectric film does not contain sharp inhomogeneities, the effect of the lower electrode polarity is manifested. In [1] it was demonstrated (with the use of an electronic microscope) that microtips reaching a maximal height of 800 ?were presented on the lower aluminum electrode [1]. Electron emission from a microtip creates a high current density if the lower electrode has negative polarity. This emission current from the microtip causes the dielectric to melt, thereby creating a melted channel with increased electrical conductivity; then the second breakdown stage is initiated, and the dielectric is destroyed in the region of a few microns [2]. For a SiO film, microcracks were recorded on the upper dielectric surface. In the process of upper electrode deposition, these cracks were filled by metal, and microtips initiating a breakdown for the negative polarity of the upper electrode were formed again [2].