The impact of molecular emission in compositional depth profiling using Glow Discharge-Optical Emission Spectroscopy

摘要

The scope of this paper is to investigate and discuss how molecular emission can affect elemental analysis in glow discharge optical emission(GD-OES),particularly in compositional depth profiling(CDP)applications.Older work on molecular emission in glow discharges is briefly reviewed,and the nature of molecular emission spectra described.Work on the influence of hydrogen in the plasma,in particular elevated background due to a continuum spectrum,is discussed.More recent work from sputtering of polymers and other materials with a large content of light elements in a Grimm type source is reviewed,where substantial emission has been observed from several light diatomic molecules(CO,CH,OH,NH,C2).It is discussed how the elevated backgrounds from such molecular emission can lead to significant analytical errors in the form of"false"depth profile signals of several atomic analytical lines.Results from a recent investigation of molecular emission spectra from mixed gases in a Grimm type glow discharge are presented.An important observation is that dissociation and subsequent recombination processes occur,leading to formation of molecular species not present in the original plasma gas.Experimental work on depth profiling of a polymer coating and a thin silicate film,using a spectrometer equipped with channels for molecular emission lines,is presented.The results confirm that molecular emission gives rise to apparent depth profiles of elements not present in the sample.The possibilities to make adequate corrections for such molecular emission in CDP of organic coatings and very thin films are discussed.