Depth profiling of solution-deposited lead zirconate titanate thin films by radio frequency glow discharge atomic emission spectroscopy (RF-GDAES)

摘要

Compositional depth profiles have been obtained on chemical solution deposited lead zirconate titanate (PZT) thin films using radio-frequency glow discharge atomic emission spectroscopy. The technique is very rapid, requiring less than one minute for complete multielement depth profiling of films and multilayer substrates. In the present study, the method was employed to obtain compositional profiles of the various metallic (Pb, Zr, Ti, Si) and organic-related (C, H, O) species that are present in the films and underlying device. Preliminary results using this relatively new technique are reported for PZT films deposited by an aqueous acetate process and heat treated at temperatures ranging from 300 and 700°C. The initial results from these investigations suggest that Pb volatilization occurs at temperatures as low as those typically encountered during the pyrolysis step. Significant interdiffusion of the Pb into the underlying Pt electrode at this temperature is also suggested. Effects of modifying ligand on film thickness and organic decomposition behavior were also observed.