GLOW DISCHARGE TUBE FOR GLOW DISCHARGE EMISSION SPECTRAL ANALYZER AND GLOW DISCHARGE EMISSION SPECTRAL ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide a glow discharge emission spectral analyzer capable of rapidly and accurately performing the surface analysis of a sample with a thickness of 0.5 mm or below without producing the measuring abnormality caused by the deformation of the sample.;SOLUTION: In the glow discharge tube for the glow discharge emission spectral analyzer, an anode tube is formed into a cylindrical shape (with a wall thickness of 1.0 mm) with an inner diameter of 1.0-below 4.0 mm.;COPYRIGHT: (C)2006,JPO&NCIPI