Nickel containing diamond like carbon thin films

摘要

Diamond like carbon (DLC) coatings are well established for multiple applications. The electrical conductivity of DLC or amorphous carbon can be influenced by several orders of magnitude via doping with different metals. Depending on the deposition process hydrogen may be incorporated as well, thereby decreasing the conductivity. Recent investigations of DLC disclose nice piezoresistive properties. Our work was focused on Ni:a-C:H thin films on different substrates by reactive sputtering from a nickel target Several carbon precursors were added to the sputtering gas to create an amorphous carbon hydrogen network with embedded crystal clusters. In order to optimize the piezoresistive properties we varied various process parameters. The piezoresistive response was monitored by measuring the resistance change during bending. Our Ni:a-C:H films develop gauge factors of approx. 12 in a wide range of process parameters. For sensor applications the temperature coefficient of resistance (TCR) is important as well. It depends on the metal concentration in the thin film and can be adjusted by the concentration of the incorporated nickel. It can be set to approximately zero in a wide temperature range of 80-400 K. The combination of a high gauge factor and a very small TCR is achieved and described in this paper. XRD measurements reveal nickel or nickel carbide clusters with diameters of approx. 8-30 nm depending on the metal concentration. The clusters crystallize in the hexagonal hcp structure which could be transformed into the cubic fcc structure of nickel by thermal annealing in a vacuum.