MANUFACTURE OF DIAMOND LIKE CARBON THIN FILM AND DISSIMILAR ATOM SUBSTITUTED DIAMOND LIKE CARBON THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method to form a diamond like carbon thin film and a dissimilar atom substituted diamond like carbon thin film in which the carbon of the diamond-like carbon is substituted by various dissimilar atoms in the laser ablation method. ;SOLUTION: In a method to form a diamond like carbon thin film, the polymer material, the polymer material in which the compound having the dissimilar atoms as the composition is mixed in the polymer, or the polymer material in which the dissimilar atom is in the bonded condition is used for a target 3 in a preparing a film by depositing the diamond like carbon thin film or the dissimilar atom substituted diamond like carbon thin film by the laser ablation method.;COPYRIGHT: (C)1997,JPO