Excimer-Laser Annealing: Microstructure Evolution and a Novel Characterization Technique

摘要

Recent commercial success of high-resolution AMLCDs and AMOLED displays has led to accelerated adoption and scale-up of ELA, the preferred technique for creating LTPS films. Here, key aspects of the process are discussed; in particular, the formation of laser-induced periodic surface structures (LIPSS) and the super-lateral growth (SLG) phenomenon. Also, a novel upright-microscopy technique is described for characterization of ELA-processed films.