MONITORING METHOD AND APPARATUS FOR EXCIMER-LASER ANNEALING PROCESS

摘要

A method of evaluating a crystallized silicon layer (12) on a substrate(18) includes injecting light into the substrate (18) in such a way that it is wave-guided by the substrate(18). Wave-guided injected light is diffracted out of the substrate (18) by periodic features of the silicon layer(12). The diffracted light is detected and processed to evaluate the crystalline layer.