New TPS Function for Identifying Nano-Scale Organic Film Phase in Large-size AMOLED Deposition Processes using Belt Source Evaporation Techniques

摘要

New TPS(Temperature Programmed Sublimation) technology has been developed in order to deploy to the belt source evaporation for large-size AMOLED deposition processes. When the organic film deposit on the metal plate, we have found it has nano-scale film phase and bulk phase for the first time. The film phase of the Alq3 has 2,000A for its saturated thickness and 155℃ for its sublimation temperature. Also, there are no particles generated during plane source sublimation and TPS function as a powerful tool provides optimum thickness information for the AMOLED deposition processes.