AMOLED Multiple curved plane evaporation source for organic film deposition process of high resolution AMOLED device

摘要

The present invention relates to a multi-curved evaporation source for manufacturing ultra-high resolution AMOLED deposition, wherein a double curved evaporation source having a plurality of circular curved patterns with different curvatures, a multiple curved evaporation source, a double circular curved evaporation source, or a donor deposited on a curved metal sheet of a multiple circular curved evaporation source By using organic thin films, the effective area of the target organic thin film formed on the substrate by the organic substance gas evaporated by focusing evaporation during re-evaporation increases the utilization rate of organic materials, and the thickness uniformity of the pattern thin film of the target organic thin film is improved, and the vertical evaporation rate is increased. As a result, the shadow phenomenon is further reduced, and the shadow distance of the patterned thin film is further reduced, thereby enabling deposition of an ultrafine patterned thin film having a resolution of 2250 ppi.