Single Source Techniques for the Evaporation of Alloy Films. Steady State Evaporation of InSb and Bi-Sb Alloys

摘要

A procedure is described that allows the evaporation, from a single source containing starting mixture or alloy of given compositon, a vapor mixture having the same composition as the starting mixture. The procedure is referred to as steady-state evaporation. Details of the experimental evaluation of the procedure are given. InSb and Bi-Sb alloys are used as test mixtures because they represent extremes of relative volatility of the components. The theory is briefly summarized. Techniques for the analysis of films by x-ray fluorescence are described in detail. (Author)