Belt Source and In-Line Manufacturing Equipment for Very Large-Size AMOLED

摘要

The inline manufacturing equipment using a combination of the belt source and LPS source which is innovatively designed is introduced for the largesize AMOLED. The features of the inline system include 60sec TACT time, 19 numbers of chambers, non-substrate bending and easy application to very thin TFT substrates for the 4th - 8th Generation AMOLEDs.