Advanced Sputtering Technologies and Targets for Oxide Semiconductor TFT

摘要

Recently, oxide semiconductors have been coming under the spotlights as a replacement of the amorphous silicon (a-Si) and it is going to be taken into mass production of Active Matrix-Liquid Crystal Displays (AM-LCD). However, innovation or further optimization has still been required in film deposition techniques and also in the arrangement of sputtering targets for high definition Active Matrix-Organic Light Emitting Diodes (AM-OLED). In this report, ULVAC addresses our analysis and approaches for those issues.