Crystallization of Amorphous Silicon Films on Flexible Glass by Blue-Multi-Diode-Laser Annealing as a New LTPS

摘要

In this paper, we have successfully crystallized the amorphous silicon thin films on flexible thin glass of 100μm by adopting blue-multi-diode-laser annealing. The crystallized films on flexible thin glass showed high crystallinity and good electrical properties as well as on the conventional thick glass with the thickness of 0.7 mm.