Highly Stable Organic Thin-Film Transistor array Fabricated on Gorilla Glass Substrates using Direct Photolithography

摘要

Photolithography is applied to pattern PTDC16DPPTDC17FT4-based organic thin-film transistors (OTFTs) array on the ion-exchanged NAS glass substrate with pattern features down to 10 μm. Result demonstrates high stability and excellent uniformity of bottom contact OTFT devices incorporated with a photo-patternable polymer gate insulator over 2" × 2" Gorilla glass substrates.