Micro-scale twistable organic field effect transistors and complementary inverters fabricated by orthogonal photolithography on flexible polyimide substrate

摘要

We fabricated micro-scale organic field effect transistors (OFETs) and complementary inverters on a twistable polyimide (PI) substrate by applying orthogonal photolithography. By applying a highly fluorinated photoresist and development solvent, it becomes possible to create organic electronic devices with a micro-scale channel length without damaging the underlying polymer films. The 3 μm-channel twistable pentacene OFET devices and complementary inverters created using p-type pentacene and n-type copper hexadecaflu-orophthalocyanine exhibited stable electrical characteristics from flat to twist configurations (angle of up to ～50°). The realization of twistable micro-scale OFETs and inverter devices on a PI substrate may enable the production of functioning organic devices in practical, flexible configurations.