A novel micro electric field sensor with X-Y dual axis sensitive differential structure

摘要

This paper presents a novel X-Y dual axis sensitive sensor for static electric field measurement. Compared with the existent electric field micro sensors, which can only detect one axial direction electric field, this sensor is capable of two-dimensional electric field sensing. In the design of the micro sensor, the combination of angular comb-drives and serpentine springs can bring the advantage of achieving large in-plane rotation, which enlarges the vibration amplitudes and results in more induced charges. Moreover, the push-pull electrostatic actuation method and the adopted differential sensing electrodes both can reduce the impact of common mode interference. Two pairs of sensing elements are located differentially to form a cross-like shape, with each pair to get X and Y component of the electric field respectively. Experimental results agree well with the electric field calibration theory and show high measurement accuracy. In the range from 0 to 25 kV/m, the errors of electric field value are better than 8%. (C) 2015 Elsevier B.V. All rights reserved.