This paper introduces piezoresistive encoders that can provide information on the performance of ratcheting actuation systems, and may be useful in future applications that require position determination. One unique feature of the encoders is that they gain their piezoresistance from the bulk properties of polycrystalline silicon without additional fabrication steps. In this study, two encoders are considered: a parallel-guiding encoder in an on-chip Wheatstone bridge, and a piezoresistive microdisplacement transducer (PMT) encoder in an on-chip Wheatstone bridge. In tests, the encoders each generated measurable signals, with the PMT encoder providing the best sensitivity. The PMT encoder operated at actuation frequencies up to 920 Hz and produced a signal between 2 V and 3.2 V (applied gain of 1000). The PMT encoder produced unique signals corresponding to distinct ideal and non-ideal behaviors of a ratchet wheel actuation system.
展开▼
