Grain refinement with increasing magnetron discharge power in sputter deposition of nanostructured titanium aluminium nitride coatings

摘要

Nanostructured titanium aluminium nitride coatings were produced via magnetron co-sputtering. The results showed the significant effect of magnetron discharge power on structural refinement of the coatings. As the aluminium magnetron power increased from 1.5 to 6.0 W/cm~2, the average grain diameter of the coatings was reduced from approx 210 to approx 90 nm.