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Low-loss polymeric optical waveguides with large cores fabricated by hot embossing

机译:通过热压印制造的具有大芯径的低损耗聚合物光波导

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摘要

A simple low-cost method of fabricating polymeric optical waveguides with large core sizes for plastic optical fibers is presented. The waveguides are fabricated by hot embossing with an ultraviolet-cured epoxy resin stamper. The stamper is fabricated by replication of a rectangular groove mold that is made from silicone rubber replicated from a ridged original silicon master. The master is fabricated by anisotropic etching of (110) single-crystal silicon. Optical waveguides with large core sizes of 100-500 μm have been fabricated, and a low propagation loss of 0.19 dB/cm at 650 nm was achieved.
机译:提出了一种简单的低成本方法来制造用于塑料光纤的具有大芯径的聚合物光波导。通过用紫外线固化的环氧树脂压模热压花来制造波导。通过复制矩形凹槽模具来制作压模,该矩形凹槽模具由从脊状原始硅母盘复制的硅橡胶制成。通过对(110)单晶硅进行各向异性蚀刻来制造母盘。已制造出具有100-500μm大纤芯尺寸的光波导,并在650 nm处实现了0.19 dB / cm的低传播损耗。

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